New PDF release: Ceramic Thick Films for MEMS and Microdevices

By Robert A. Dorey

ISBN-10: 1437778178

ISBN-13: 9781437778175

Content material:
Front Matter

, Pages ii-iii
Copyright

, Page iv
Preface

, Page xiii
Acknowledgments

, Page xv
Introduction

, Pages xvii-xviii
Chapter 1 - Integration and units: What form of constructions are required for thick-film units, why is it tough to cause them to, and the way can the demanding situations be overcome?

, Pages 1-33
Chapter 2 - Routes to thick movies: what's a thick movie? How is it made?

, Pages 35-61
Chapter three - Thick-film deposition innovations: the right way to make thick motion pictures – the processing ideas used to create films

, Pages 63-83
Chapter four - Microstructure–property relationships: How the microstructure of the movie impacts its properties

, Pages 85-112
Chapter five - Patterning: tips to move from a coating to a shape

, Pages 113-143
Chapter 6 - Houston, we've an issue: tips to repair it whilst all of it is going wrong

, Pages 145-166
Chapter 7 - Recipes: Let’s get cooking!

, Pages 167-181
Bibliography

, Pages 183-185
Index

, Pages 187-191

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Extra resources for Ceramic Thick Films for MEMS and Microdevices

Example text

Near to the edges of the film (or isolated feature), the degree of constraint is reduced as there is no material preventing the edges from moving inward on densification. This means that film in this region is able to densify to a relatively high degree. At the edge of the feature, close to the substrate, the film is constrained, and is also not surrounded by as much material from where matter can be redistributed to relieve the stresses generated. In this region, the density of the film is much lower.

In the case of a powder compact, the total surface energy will be related to the total surface area of all the particles. 3 Thick-film powder-based routes 41 (particles joined) or bulk material (particles fully fused), then the energy of the system can be greatly reduced. The initial stage of sintering is often simplified to the case of two touching spherical particles. The chemical potential of a convex surface, such as the surface of the particle, is higher than the chemical potential of a flat surface, which in turn is higher than the chemical potential of a concave surface.

3 Pyroelectric devices Related to piezoelectric devices are pyroelectric devices, which share a common family of materials. This is because the piezoelectric materials used in thick-film devices are actually ferroelectric materials. In addition to being piezoelectric, these ferroelectric materials are pyroelectric. Pyroelectric materials generate an electrical signal when subjected to changes in temperature. 1 Pyroelectric sensors Responding to changes in temperature, pyroelectric materials are used in a range of thermal-sensing devices including intruder alarms, infrared thermal imagers, and gas sensors.

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Ceramic Thick Films for MEMS and Microdevices by Robert A. Dorey


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